Energy, Department Of- Energy, Department Of- Slac Natl Accel Lab - Doe Contractor
Tabletop Maskless Aligner System - SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to th
tabletop maskless aligner system tabletop maskless lithography system mounted on an anti vibration table suitable for cleanroom installation; dual exposure capability including raster mode and stitching free mode; broadband and special i line photoresists; minimum feature size alignment system; overlay 2nd layer alignment accuracy; focusing system real time autofocus combined with optical focusing capability; vacuum chuck supporting a range of sample sizes; minimum substrate size 6; substrate thickness range covers 0. 1- 10 mm; native support for standard cad formats including gdsii, dxf, cif, and bmp.
Bid Close Date: