This is a Sources Sought Notice for a Rapid Thermal Annealing (RTA) System to support the Boulder Microfabrication Facility (BMF) at NIST. The BMF requires an RTA system capable of processing up to 150 mm substrates, meeting semiconductor industry standards, and operating within an ISO Class 5 cleanroom. Key specifications include temperature range (room temperature to **** with ±1°C stability), ramp rate (at least 100°C/s), vacuum and gas annealing capabilities (at least 4 gases), and physical dimensions (1m x 1m x 2m). The system must accommodate substrates from chips to 150 mm wafers and preferably use a clamshell loading system. Prototypes, used, or refurbished instruments will not be considered. Interested parties should submit company information, product details, technical specifications, reseller status (if applicable), performance capabilities, customization options, any unmet specifications, manufacturing origin, and available services such as installation, training, and maintenance. Responses are due by 5:00 PM ET on April 14, 2026. Registration in SAM. gov is required for award consideration. This notice is for market research only and does not constitute a commitment to issue a solicitation or award a contract.
The notice requests responses to be submitted as soon as possible, and preferably before the closing date and time of this notice, which is April 14, 2026, at 5:00 PM ET.
The notice asks respondents to describe the manufacturer warranty, including details regarding its nature and duration, and any available extended warranty options.
This notice is for market research purposes and does not constitute a commitment by NIST to issue a solicitation or ultimately award a contract. Therefore, no award criterion is specified.
To be considered for award under any official solicitation, the entity must be registered and active in SAM at the time of solicitation response. Respondents should also provide company information, product details, technical specifications, and describe their capabilities to meet the government's requirements.
The notice asks if the company would be interested in inspecting the intended installation site during the market research phase.
The notice states that questions regarding this notice should be submitted so that they are received by 5:00 PM ET on April 14, 2026. If a written amendment is issued to document questions, a written response would be provided via that amendment.